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Zhidk. krist. ikh prakt. ispol'z. = Liq. Cryst. and their Appl., 2009, 2, 60—69.
Novel Porous Films with Low Dielectric Constant, Prepared Using lyotropic Liquid Crystals
A. A. Sonin
Author affiliations "MAMI" Moscow State Technical University
Department of Physics
Russia 107023 Moscow, B. Semenovskaja Str., 38. E-mail: email@example.com
Abstract Solid porous low dielectric constant films were fabricated using original precursor solutions of CTAB/NaSal/TEOS and CTAB/TCS-2/TEOS. The electron microscopy data showed that the CTAB/NaSal/TEOS films contained spatially ordered elongated cylindrical pores, while the CTAB/TCS-2/TEOS films – spacially disordered spherical micropores. In order to increase the CTAB/NaSal/TEOS film mechanical moduli, a novel method of orientation of pores by an external electric field was proposed. Both the film heating and its treatment with hydrophobizing agents and their solutions in supercritical CO2 were used to decrease the film dielectric constants. It was shown that the CTAB/TEOS/NaSal films exhibited greater mechanical moduli, while the CTAB/TCS-2/TEOS films – lower values of dielectric constant.